| 規(guī)格參數(shù) | |||||||||
| 項(xiàng)目/ltem | 單位/Unit | 參數(shù)/Parameter | |||||||
|
電源參數(shù) Power Supply |
輸入電壓 Input Voltage | VAC | 170-264 | ||||||
| 輸出電壓 Output Voltage | VDC | ±15 | |||||||
| 額定輸出電流 Current | A | 10 | |||||||
|
控制卡參數(shù) Control Card |
輸出接口 Input interface | XY2-100協(xié)議 | |||||||
| 輸入接口 Output interface | 網(wǎng)口 Entermet Port | ||||||||
| 激光器控制 Laser type | 紫外、光纖、綠光激光器 | ||||||||
|
環(huán)境要求 Environmental Requirement |
工作溫度 Ambient temperature | ℃ | 0～+40 | ||||||
| 存儲(chǔ)溫度 Storage temperature | ℃ | 一10～+60 | |||||||
| 濕度 Humidity | ≤75%無(wú)凝結(jié) | ||||||||
|
振鏡參數(shù) Specifications For Defiection Unit |
工作偏轉(zhuǎn)角 Scan angle | ° | ±11.5 | ||||||
| 重復(fù)標(biāo)刻精度 Repeatability | urad | 5 | |||||||
| 最大增益漂移 Max.Gain Drift | ppm/K | 12 | |||||||
| 最大位置漂移 Max.Offset driff | urad/K | 30 | |||||||
|
8小時(shí)連續(xù)工作漂移 Long-term driff over 8h |
mrad | 0.3 | |||||||
| 最大加工速度 Maximal processing speed | 字符/s | 650 | |||||||
| 小步長(zhǎng)階躍相應(yīng)時(shí)間 Small step response | ms | ≤0.18 | |||||||
|
動(dòng)態(tài)變焦系統(tǒng)參數(shù) Dynamic zoom system parameters |
小步長(zhǎng)階躍相應(yīng)時(shí)間 Small step response |
ms | ≤1.6 | ||||||
|
光學(xué)參數(shù) Specifications For Optics |
激光介質(zhì) Laser | UV Laser | YAG/Fiber | Green | |||||
| 波長(zhǎng) Wavelenth | nm | 355 | 1064 | 532 | |||||
| 鍍膜 Coating | 抗反射膜 | ||||||||
| 振鏡通光直徑 Aperture size | mm | φ10 | |||||||
| 系統(tǒng)入射光斑 System input laser beam | mm | 6.5 | 7 | 7 | |||||
|
結(jié)構(gòu)參數(shù) Specifications For Structure |
重量 Weight | Kg | 8 | ||||||
| 尺寸 Dimension(L×W×H) | mm | 324x140x181.5 | |||||||
|
3D系統(tǒng) 幅面和光斑直徑 3D system Field Size& Spot Diameter |
紫外 UV |
工作范圍 field size | mm | 100x100x40 | 200x200x80 | 300x300x150 | 400x400x150 | 500x500x150 | 600x600x150 |
|
最小光斑直徑((基于光束質(zhì)量M2=1)) The Smallest Spot diameter1/e2 |
mm | 0.009 | 0.015 | 0.022 | 0.026 | 0.033 | 0.039 | ||
|
光纖 Fiber |
工作范圍 field size | mm | 60x60x60 | 100x100x90 | 100x100x40 | 200x200x80 | |||
|
最小光斑直徑((基于光束質(zhì)量M2=1)) The Smallest Spot diameter1/e2 |
mm | 0.021 | 0.027 | 0.025 | 0.0415 | ||||
|
綠光 Green |
工作范圍 field size | mm | 100x100x40 | 200x200x80 | 300x300x150 | 400x400x150 | 500x500x150 | 600x600x150 | |
|
最小光斑直徑((基于光束質(zhì)量M2=1)) The Smallest Spot diameter1/e2 |
mm | 0.013 | 0.023 | 0.031 | 0.04 | 0.0496 | 0.059 | ||
|
2.5D系統(tǒng) 幅面和光斑直徑 2.5D system Field Size& Spot Diameter |
綠光2.5D系統(tǒng) | 波長(zhǎng) Wavelength | nm | 532nm | |||||
|
振鏡通光直徑 Aperture size |
mm | φ14 | |||||||
|
系統(tǒng)入射光斑 System input laser beam |
mm | φ3.5 | |||||||
| 工作范圍 field size | mm | 70x70 | |||||||
| Z軸聚焦范圍 Focus range in Z-direction | mm | ±5mm | |||||||
|
場(chǎng)鏡離工作面距離 Distance of F-Theta from working face |
mm | 93.03mm | |||||||
|
最小光斑直徑((基于光束質(zhì)量M2=1)) The Smallest Spot diameter1/e2 |
mm | 0.01mm | |||||||
| 應(yīng)用行業(yè) Application Industry | 玻璃面板切割&鉆孔 Glass panel cutting&driling | ||||||||
| 加工效率 Machining efficiency |
3mm厚玻璃，孔徑4.6mm,切割用時(shí)≤15s 3mm thick glass,with aperture of 4.6mm,cutting time≤15s |
||||||||
| 光纖2.5D系統(tǒng) | 波長(zhǎng) Wavelength | nm | 1064nm | ||||||
|
振鏡通光直徑 Aperture size |
φ14 | ||||||||
|
系統(tǒng)入射光斑 System input laser beam |
7mm | ||||||||
| 工作范圍 field size | mm | 210*210 | |||||||
| Z軸聚焦范圍 Focus range in Z-direction | mm | ±20mm | |||||||
|
場(chǎng)鏡離工作面距離 Distance of F-Theta from working face |
mm | 93.03mm | |||||||
|
最小光斑直徑((基于光束質(zhì)量M2=1)) The Smallest Spot diameter1/e2 |
um | 45 | |||||||
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