大族思特5軸振鏡微加工系統(tǒng)參數(shù)：
| 項(xiàng)目/ltem | 單位/Unit | 參數(shù)/Parameter | |||||||
|
電源參數(shù) Power Supply |
輸入電壓 Input Voltage | VAC | 170-264 | ||||||
| 輸出電壓 Output Voltage | VDC | ±15 | |||||||
| 額定輸出電流 Current | A | 10 | |||||||
|
控制卡參數(shù) Control Card |
輸出接口 Input interface | XY2-100協(xié)議 | |||||||
| 輸入接口 Output interface | 網(wǎng)口 Entermet Port | ||||||||
|
環(huán)境要求 Environmental Requirement |
工作溫度 Ambient temperature | ℃ | 0～+40 | ||||||
| 存儲溫度 Storage temperature | ℃ | 一10～+60 | |||||||
| 濕度 Humidity | ≤75%無凝結(jié) | ||||||||
| 激光器參數(shù) | 波長 Wavelenth | nm | Wavelength 1030 nm or 1064 nm | ||||||
| 典型激光功率 Typical average power | W | ≤100w | |||||||
| 典型脈寬 Typical pulse length | 250fs to 20ps | ||||||||
| 激光器參數(shù) | |||||||||
|
工作范圍 Working field size (diameter, depending on nozzle opening) |
mm | φ0.8mm to φ3.0mm | |||||||
|
Z方向最大變焦范圍 Maximum focus range in z direction |
mm | ±1mm | |||||||
|
系統(tǒng)入射光斑大小 entrance beam diameter (1/e2) |
mm | 10mm | |||||||
|
聚焦光斑大小(1/e2)M2=1 focus diameter in image field (1/e2) for M2 = 1 |
um | 25um | |||||||
|
最大進(jìn)給角度 Maximum angle of incidence |
18° | ||||||||
|
旋進(jìn)頻率 Precession frequency |
HZ | 200-600HZ（12000-36000rpm） | |||||||
|
物鏡焦距 Objective focal length |
mm | 50mm | |||||||
|
重復(fù)精度 Repeatability |
um | ≤0.5um（常溫老化8H） | |||||||
|
入射角的理論分辨率 Theoretical resolution of incidence angle |
urad | 2urad | |||||||
| 尺寸 Dimension(L*W*H) | mm | 601×280×274 | |||||||
| 重量 Weight | Kg | 23.5 | |||||||
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